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Webstepper for site by site correction exposures, Fig 1 shows the To find the balance point between throughput and overlay is feedforward scenario. one of the biggest challenges for FOPLP. In this ... Lithography System and process The lithography system employed in this study was an Onto Innovation JetStep 3500 System. A single iteration of photolithography combines several steps in sequence. Modern cleanrooms use automated, robotic wafer track systems to coordinate the process. The procedure described here omits some advanced treatments, such as thinning agents or edge-bead removal. The photolithography process is carried out by the wafer track and stepper/scanner, and the wafer track syste… ciclo for y for each
Ultratech Steppers Company History The Chip History Center
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